Study of silicon strain in shallow trench isolation
- M. Belyansky
- N. Klymko
- et al.
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Deposition of aluminum-doped zinc oxide thin films for optical applications using rf and dc magnetron sputter deposition
- Kousik Sivakumar
- S.M. Rossnagel
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Sidewall damage in plasma etching of Si/SiGe heterostructures
- R. Ding
- L.J. Klein
- et al.
- 2009
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma etching of Hf-based high- k thin films. Part III. Modeling the reaction mechanisms
- Ryan M. Martin
- Jane P. Chang
- 2009
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma etching of Hf-based high- k thin films. Part II. Ion-enhanced surface reaction mechanisms
- Ryan M. Martin
- Hans-Olof Blom
- et al.
- 2009
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma etching of Hf-based high- k thin films. Part I. Effect of complex ions and radicals on the surface reactions
- Ryan M. Martin
- Jane P. Chang
- 2009
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface patterns from block copolymer self-assembly
- Ho-Cheol Kim
- William D. Hinsberg
- 2008
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Role of chamber dimension in fluorocarbon based deposition and etching of Si O2 and its effects on gas and surface-phase chemistry
- E. Joseph
- B.-S. Zhou
- et al.
- 2008
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thin film reaction of transition metals with germanium
- S. Gaudet
- C. Detavernier
- et al.
- 2006
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In situ photovoltage measurements using femtosecond pump-probe photoelectron spectroscopy and its application to metal-HfO 2-Si structures
- Daeyoung Lim
- Richard Haight
- 2005
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films