Selective Studies of Chemical Vapor-Deposited Aluminum Nitride-Silicon Nitride Mixture Films
- S. Zirinsky
- E.A. Irene
- 2019
- JES
Publications
14336 results for Physical Sciences
RIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- Israel Lerner
- Jerome M. Eldridge
- 2019
- JES
Self-Diffusion and Na-K Exchange in βand β”-Na-Gallate Fast Ion Conductors
- L.M. Foster
- D.R. Campbell
- et al.
- 2019
- JES
Single Crystal Silicon Films on Amorphous Insulators: Growth by Lateral Nucleated Epitaxy Using Scanning Laser and Electron Beams and Evaluation by Electron Backscattering Contrast
- T.O. Sedgwick
- R.H. Geiss
- et al.
- 2019
- JES
Anodic Etching of Defects in P-Type Silicon
- H. Föll
- 2019
- JES
Effects of Oxidation on the Atmospheric Corrosion of Permalloy Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
Properties of AI2O3 Films Deposited from the AICI3, CO2, and H2 System
- V.J. Silvestri
- C.M. Osburn
- et al.
- 2019
- JES
Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- J.M. Shaw
- M. Hatzakis
- 2019
- JES
Etching Silicon with Fluorine Gas
- M. Chen
- V.J. Minkiewicz
- et al.
- 2019
- JES