Line edge roughness in positive-tone chemically amplified resists: Effect of additives and processing conditions
- Qinghuang Lin
- Dario L. Goldfarb
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
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Automated search method for AFM and profilers
- Michael Ray
- Yves C. Martin
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Feature-shape and line-edge roughness measurement of deep sub-micron lithographic structures using small-angle neutron scattering
- Eric K. Lin
- Wen-li Wu
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
A high performance E-beam resist coupling excellent dry etch resistance and sub 100nm resolution for advanced mask and device making
- Wu-Song Huang
- Ranee Kwong
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Performance characterization of a data mining application via hardware-based monitoring
- Mathew Thoennes
- Charles Weems
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Illusion in reality: Visual perception in displays
- Lloyd Kaufman
- James H. Kaufman
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Grading interfaces - A new concept to improve device performance in organic multilayer light-emitting diodes
- H. Riel
- S. Barth
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Constrained querying of multimedia databases: Issues and approaches
- A.P. Natsev
- J.R. Smith
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Progress in read-write fast-access volume holographic data storage
- Geoffrey W. Burr
- Erwin Mecher
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering