Sub-20 nm abrupt USJ formation with long ms-flash with sub-2 nm dopant motion control
- Kam-Leung Lee
- Isaac Lauer
- et al.
- 2010
- IWJT 2010
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Advanced junction formation for Sub-32nm logic devices
- Sadanand V. Deshpande
- Ahmet Ozcan
- et al.
- 2010
- IWJT 2010