Characterization of silicide-silicon interface contact resistivity using 1-D dual transmission line model approximation of modified cross bridge kelvin measurements
- Ankur Arya
- Balaji Jayaraman
- et al.
- 2011
- IWPSD 2011
Publications
Date
Featured collections
Popular topics
2 results at IWPSD 2011
Measurement and analysis of source/drain contact resistance in FinFETs
- Abhisek Dixit
- Nadine Collaert
- et al.
- 2011
- IWPSD 2011