Spiral and solenoidal inductor structures on silicon using Cu-damascene interconnects
- D. Edelstein
- J.N. Burghartz
- 1998
- IITC 1998
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3 results at IITC 1998
Copper dual damascene wiring for sub-0.25 μm CMOS technology
- J. Heidenreich
- D. Edelstein
- et al.
- 1998
- IITC 1998
Dielectric anti-reflection coating application in a 0.175 μm dual-damascene process
- G.Y. Lee
- Z.G. Lu
- et al.
- 1998
- IITC 1998