Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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20 results at MRS Proceedings 2002

Epitaxial Si films grown on lattice matched (La_xY _1-x)O₃/Si (111) structures by molecular beam epitaxy
- - V. Narayanan
  - S. Guha
  - et al.
- 2002
- MRS Proceedings 2002
Ferroelectric field effect device
- - A.G. Schrott
  - J. Misewich
  - et al.
- 2002
- MRS Proceedings 2002
Kinetics of agglomeration of NiSi and NiSi₂ phase formation
- - C. Detavernier
  - A.S. Özcan
  - et al.
- 2002
- MRS Proceedings 2002
A selective etching process for chemically inert high-k metal oxides
- - Katherine L. Saenger
  - Harald F. Okorn-Schmidt
  - et al.
- 2002
- MRS Proceedings 2002
Resist requirements and limitations for nanoscale electron-beam patterning
- - J. Alexander Liddle
  - Gregg M. Gallatin
  - et al.
- 2002
- MRS Proceedings 2002
Optical nanolithography using evanescent fields
- - Richard J. Blaikie
  - Sharee J. McNab
  - et al.
- 2002
- MRS Proceedings 2002
Ion projection direct-structuring for nanotechnology applications
- - Hans Loeschner
  - Ernest J. Fantner
  - et al.
- 2002
- MRS Proceedings 2002
Influence of substrate temperature during sputter deposition on the subsequent formation of titanium disilicide
- - A.S. Özean
  - K.F. Ludwig Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Silicon self-interstitial cluster formation and dissolution in SOI
- - A.F. Saavedra
  - J. Frazer
  - et al.
- 2002
- MRS Proceedings 2002
Characterization and monitoring of silicon-on-insulator fabrication processes by high-resolution x-ray diffraction
- - G.M. Cohen
  - P.M. Mooney
  - et al.
- 2002
- MRS Proceedings 2002