Polysilanes: photochemistry and deep UV lithography
- R.D. Miller
- G.M. Wallraff
- et al.
- 1988
- SPE Regional Technical Conference 1988
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3 results at SPE Regional Technical Conference 1988
Novel photoresist design based on electrophilic aromatic substitution
- B. Reck
- R.D. Allen
- et al.
- 1988
- SPE Regional Technical Conference 1988
Epoxy resins for deep UV lithography
- K.J. Stewart
- M. Hatzakis
- et al.
- 1988
- SPE Regional Technical Conference 1988