Investigation of the mechanism of Si self-interstitial injection from nitridation of SiO2 films
- P. Fahey
- P.B. Griffin
- 1990
- Silicon Materials Science and Technology 1990
Publications
Date
Featured collections
Popular topics
4 results at Silicon Materials Science and Technology 1990
Deep submicron silicon devices: Materials and processing issues
- C.Y. Wong
- Tak II. Ning
- 1990
- Silicon Materials Science and Technology 1990
EPI active devices
- G.L. Patton
- B.S. Meyerson
- et al.
- 1990
- Silicon Materials Science and Technology 1990
Low temperature selective epitaxial growth of silicon at atmospheric pressure in an ultra-clean system
- T.O. Sedgwick
- P. Agnello
- et al.
- 1990
- Silicon Materials Science and Technology 1990