Publications

4 results at Silicon Materials Science and Technology 1990

Investigation of the mechanism of Si self-interstitial injection from nitridation of SiO₂ films
- - P. Fahey
  - P.B. Griffin
- 1990
- Silicon Materials Science and Technology 1990
Deep submicron silicon devices: Materials and processing issues
- - C.Y. Wong
  - Tak II. Ning
- 1990
- Silicon Materials Science and Technology 1990
EPI active devices
- - G.L. Patton
  - B.S. Meyerson
  - et al.
- 1990
- Silicon Materials Science and Technology 1990
Low temperature selective epitaxial growth of silicon at atmospheric pressure in an ultra-clean system
- - T.O. Sedgwick
  - P. Agnello
  - et al.
- 1990
- Silicon Materials Science and Technology 1990

Investigation of the mechanism of Si self-interstitial injection from nitridation of SiO2 films