Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
- H. Kim
- S.M. Rossnagel
- 2002
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
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7 results at Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Electron dynamics in unoccupied molecular orbitals of two blue-light-emitting organic electroluminescent materials
- H.S. Karlsson
- K. Read
- et al.
- 2002
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Phase boundary fluctuations on Si(111)
- J.B. Hannon
- R.M. Tromp
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Perpendicular magnetic anisotropy in ultrathin yttrium iron garnet films prepared by pulsed laser deposition technique
- E. Popova
- N. Keller
- et al.
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Interfacial reaction pathways and kinetics during annealing of 111-textured Al/TiN bilayers: A synchrotron x-ray diffraction and transmission electron microscopy study
- J.-S. Chun
- P. Desjardins
- et al.
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Relationship between deprotection and film thickness loss during plasma etching of positive tone chemically amplified resists
- A. Mahorowala
- D. Medeiros
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Wear of ultrathin carbon overcoat characterized by microwear scan and Auger electron spectroscopy
- Tsai-Wei Wu
- Vaughn Deline
- et al.
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films