Publications

3 results at Diffusion and Defect Data Pt.B: Solid State Phenomena

New aqueous clean for aluminum interconnects: Part I. Fundamentals
- - D.L. Rath
  - R. Ravikumar
  - et al.
- 2000
- Diffusion and Defect Data Pt.B: Solid State Phenomena
Characterization of DI water/O₃ oxidation of Si (100) and Si (111) surfaces by OCP measurements
- - H. Okorn-Schmidt
  - C. D'Emic
  - et al.
- 2000
- Diffusion and Defect Data Pt.B: Solid State Phenomena
New aqueous clean for aluminum interconnects: Part II. Applications
- - R. Ravikumar
  - D.L. Rath
  - et al.
- 2000
- Diffusion and Defect Data Pt.B: Solid State Phenomena