Dry heterometallic resist processing based on thermal sublimation deposition and developmentDario GoldfarbScott Lewiset al.2022JM3
19 Feb 2008US7332436Process Of Removing Residue From A Precision Surface Using Liquid Or Supercritical Carbon Dioxide Composition
30 Oct 2007US7288155Apparatus And Method For Rapid Thermal Control Of A Workpiece In Liquid Or Dense Phase Fluid
12 Jun 2007US7229936Method To Reduce Photoresist Pattern Collapse By Controlled Surface Microroughening
14 Feb 2006US6997197Apparatus And Method For Rapid Thermal Control Of A Workpiece In Liquid Or Dense Phase Fluid
