Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations
- David Melville
- Alan E. Rosenbluth
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- 2010
- SPIE Advanced Lithography 2010
Bio Dr. Jaione Tirapu-Azpiroz is a researcher at the IBM Research – Brazil, currently leading the computational modeling of carbon dioxide sequestration within porous media and the interfacing with on chip experimentation. She has experience in microfluidics, point of care devices, electromagnetics, optical lithography and microfabrication. Prior to joining IBM Research, Dr. Azpiroz was part of the IBM Semiconductor Research and Development Center in New York. She holds a doctorate degree in electrical engineering by the University of California, Los Angeles (UCLA), more than 40 patents and patent applications, and has published 2 book chapters and over 40 journal and conference papers.