SiGe heterojunctions: Devices and applications
Maurizio Arienzo, James H. Comfort, et al.
ESSDERC 1992
We report a reduced thermal-cycle emitter process using phosphorus for the fabrication of self-aligned SiGe-base heterojunction bipolar transistors. The low thermal cycle results in extremely narrow basewidths and preservation of lightly doped spacers in both the emitter-base and base-collector junctions for improved breakdown. Transistors with 35-nm basewidths were obtained with low emitter-base reverse leakage and a peak cutoff frequency of 73 GHz for an intrinsic base sheet resistance of 16 [formula omitted]. Minimum NTL and ECL gate delays of 28 and 34 ps, respectively, were obtained with these devices. © 1992 IEEE
Maurizio Arienzo, James H. Comfort, et al.
ESSDERC 1992
Steven E. Laux, Wai Lee
IEEE Electron Device Letters
Sophie Verdonckt-Vandebroek, Bernard S. Meyerson, et al.
IEEE Transactions on Electron Devices
Pong-Fei Lu, James H. Comfort, et al.
IEEE Electron Device Letters