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We describe a metal base transistor structure using amorphous silicon prepared from a silane glow discharge. We give some of the operating characteristics and evidence for true injection. The highest measured injection ratio was 8%. We discuss the reasons for the low injection ratios and suggest some improvements. © 1978.
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
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SPIE Advanced Lithography 2008
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