Skip to main content
Research
  • Blog
  • Publications
  • Careers
  • Focus areas
  • Semiconductors
  • Artificial Intelligence
  • Quantum Computing
  • Hybrid Cloud
  • About
  • Overview
  • Labs
  • People
  • Semiconductors
  • Artificial Intelligence
  • Quantum Computing
  • Hybrid Cloud
  • Overview
  • Labs
  • People
IBM logo
Research
  • Focus areas
    • Semiconductors
    • Artificial Intelligence
    • Quantum Computing
    • Hybrid Cloud
  • Blog
  • Publications
  • Careers
  • About
    • Overview
    • Labs
    • People
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
17 Mar 2004

Acid-base reactions in a positive tone chemically amplified photoresist and their effect on imaging

View publication

Abstract

No abstract available.

Related

Paper

Specific heat of silicon in the millidegree region

Robert W. Keyes

Physical Review B

Paper

Application of block-copolymer supramolecular assembly for the fabrication of complex TiO2 nanostructures

Sung Ho Kim, Oun-Ho Park, et al.

Small

Paper

Electrochemical characterization of adsorption-desorption of the cuprous-suppressor-chloride complex during electrodeposition of copper

John G. Long, Peter C. Searson, et al.

JES

Paper

Schottky contacts to cleaved GaAs (110) surfaces. I. Electrical properties and microscopic theories

A.B. McLean, R.H. Williams

Journal of Physics C: Solid State Physics

View all publications
  1. Home
  2. ↳ Publications

Date

17 Mar 2004

Publication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Authors

  • F.A. Houle
  • W.D. Hinsberg
  • M.I. Sanchez
IBM-affiliated at time of publication

Topics

  • Physical Sciences

Resources

  • Publication

Share

IBM Logo
  • Focus areas

    • Semiconductors
    • Artificial Intelligence
    • Quantum Computing
    • Hybrid Cloud
  • Quick links

    • About
    • Publications
    • Blog
    • Events
  • Work with us

    • Careers
    • Contact Research
  • Directories

    • Topics
    • People
    • Projects
  • Follow us

    • Newsletter
    • X
    • LinkedIn
    • YouTube
  • Contact IBM
  • Privacy
  • Terms of use
  • Accessibility