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IEEE J-STARS
No abstract available.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B