The early history and future of the SEM
- Oliver C. Wells
- David C. Joy
- 2006
- Surface and Interface Analysis
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19 results at Surface and Interface Analysis
Physical characterization of sub-32-nm semiconductor materials and processes using advanced ion beam-based analytical techniques
- M. Hopstaken
- D. Pfeiffer
- et al.
- 2012
- Surface and Interface Analysis
SIMS quantification of SiGe composition with low-energy ion beams
- Zhengmao Zhu
- Paul Ronsheim
- et al.
- 2011
- Surface and Interface Analysis
A comparative study of SIMS depth profiling of boron in silicon
- J.B. Clegg
- A.E. Morgan
- et al.
- 2004
- Surface and Interface Analysis
On the role of Gibbsian segregation in causing preferential sputtering
- Roger Kelly
- 2004
- Surface and Interface Analysis
Mechanism of silicon surface roughening by reactive ion etching
- Gottlieb S. Oehrlein
- Robert G. Schad
- et al.
- 2004
- Surface and Interface Analysis
Study of near‐surface disorder and surface residues after reactive Ion etching of Silicon
- G.S. Oehrlein
- G.J. Coyle
- et al.
- 2004
- Surface and Interface Analysis
Chromium chromate as an inert marker in copper oxidation
- Robert J. Day
- Margaret A. Frisch
- 2004
- Surface and Interface Analysis
Voltage contrast XPS—a novel scheme for spatially resolved XPS studies
- John J. Boland
- 2004
- Surface and Interface Analysis
Adhesion of copper and chromium films to polyimide studied by static SIMS of the interface
- W.J. van Ooij
- R.H.G. Brinkhuis
- et al.
- 2004
- Surface and Interface Analysis