An In_0.15 Ga_0.85 As/GaAs Pseudomorphic Single Quantum Well HEMT

This letter describes high electron mobility transistors (HEMT’s) utilizing a conducting channel which is a single In0.15Ga0.85As quantum well grown pseudomorphically on a GaAs substrate. A Hall mobility of 40 000 cm2/V s has been observed at 77 K. Shubnikov-de Haas oscillations have been observed at 4.2 K which verify the existence of a two-dimensional electron gas at the Ino.15Gao.85As/GaAs interface. HEMT’s fabricated with 2-μm gate lengths show an extrinsic transconductance of 90 and 140 mS/mm at 300 and 77 K, respectively—significantly larger than that previously reported for strained-layer superlattice InxGa1-xAs structures which are nonpseudomorphic to GaAs substrates. HEMT’s with 1-μm gate lengths have been fabricated, which show an extrinsic transconductance of 175 mS/mm at 300 K which is higher than previously reported values for both strained and unstrained InxGa1-xAs FET’s. The absence of AlxGa1-xAs in these structures has eliminated both the persistent photoconductivity effect and drain current collapse at 77 K. © 1985, IEEE