J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
For the interpretation of atomic- and molecular-beam diffraction experiments, it is necessary to be able to calculate scattering intensities for given surface corrugations and scattering geometries correctly and efficiently. We present here a new iterative method, based on the hard-wall approximation, which has the advantages of programming simplicity, accuracy, and the avoidance of matrix inversions. © 1982.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Frank Stem
C R C Critical Reviews in Solid State Sciences
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SPIE Advanced Lithography 2010
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Macromolecules