Phase formation in Cu(Sn) alloy thin films
- L. Clevenger
- B. Arcot
- et al.
- 1996
- MRS Spring Meeting 1996
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159 results for F.M. D'Heurle
Theoretical considerations about phase growth and phase formation
- F.M. D'Heurle
- 1995
- MRS Fall Meeting 1995
Investigating the role of grain boundaries in interface reactions
- F.M. d'Heurle
- P. Gas
- et al.
- 1994
- MRS Spring Meeting 1994
Reactive diffusion in the Ni-Si system: Influence of Ni thickness on the phase formation sequence
- C. Coïa
- C. Lavoie
- et al.
- 2005
- ECS Meeting 2005
Reactive diffusion in the Ni-Si system: Phase sequence and formation of metal-rich phases
- C. Lavoie
- C. Coia
- et al.
- 2004
- DIMAT 2004
Stress development during the reactive formation of silicide films
- Olivier Thomas
- Patrice Gergaud
- et al.
- 2004
- DIMAT 2004
Towards implementation of a nickel silicide process for CMOS technologies
- C. Lavoie
- F.M. D'Heurle
- et al.
- 2003
- Microelectronic Engineering
Interfaces in silicides
- F.M. D'Heurle
- 1996
- J. Phys. IV
Dopant diffusion in silicides: Effect of diffusion paths
- Carol Stanis
- J.M. Cotte
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SOLID SOLUTIONS OF WSi//2 WITH TiSi//2 OR TaSi//2: STRUCTURE AND RESISTIVITY.
- P. Gas
- J. Tardy
- et al.
- 1984
- ECS Meeting 1984