Ellen J. Yoffa, David Adler
Physical Review B
We have observed a unique, pressure-dependent adsorption isotherm of oxygen on the ZnSe (100) surface, which consists of an unmeasurable uptake followed by an irreversible, step-like uptake for pressures exceeding a critical value of ∼ 0.08 torr at room temperature. A partial depletion of Se accompanies this adsorption process. For incomplete oxidation, oxygen induced (2 × 1) and (3 × 1) surface reconstructions may be generated, the first such structures to be observed for semiconductors. The electron-energy-loss spectra for these surfaces and for the clean ZnSe (100)c(2 × 2) surface are presented. The clean surface exhibits a dangling-bond-derived empty surface state ∼ 1 eV above the conductor band edge, and filled surface states near 3.2, 6.5, and 15 eV below the valence band edge. © 1977.
Ellen J. Yoffa, David Adler
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Frank Stem
C R C Critical Reviews in Solid State Sciences