Application of semiconductor lithography to the fabrication of oligonucleotide arrays

G.M. Wallraff; Jeff W. Labadie; P.J. Brock; T. Nguyen; T. Huynh; W.D. Hinsberg

IS&T Annual Conference 1996

Conference paper

19 May 1996

Application of semiconductor lithography to the fabrication of oligonucleotide arrays

Abstract

Miniaturized arrays of immobilized oligonucleotide probes have immense potential as tools for the rapid analysis of DNA and RNA sequences. We describe here new methods for the fabrication of such arrays wherein polymeric photoresists serve as the photoimageable component.

Conference paper