Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.