Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Mixed rare earth iron garnet films containing calcium and germanium have been grown on (111) oriented gadolinium gallium garnet (GGG) substrates. The effect of growth conditions on film composition and properties is discussed. The 5 μm diameter bubble films have good magnetic properties; however, temperature control during film growth is very critical. © 1975 Chapman and Hall Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ellen J. Yoffa, David Adler
Physical Review B
T.N. Morgan
Semiconductor Science and Technology
J. Tersoff
Applied Surface Science