Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
No abstract available.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010