Scott K. Reynolds
IEEE Journal of Solid-State Circuits
We have studied the chemical vapor deposition of copper from 1,5-cyclooctadiene Cu(I) hexafluoroacetylacetonate, a moderately volatile yellow cystalline solid. It yields pure copper by pyrolytic decomposition at 150-250 °C, produces copper films with near bulk resistivity, and has the advantage of being air stable at room temperature.
Scott K. Reynolds
IEEE Journal of Solid-State Circuits
Sudipto Chakraborty, Scott K. Reynolds, et al.
IMS 2003
Anup P. Jose, Keith A. Jenkins, et al.
VTS 2005
Petar K. Pepeljugoski, José A. Tierno, et al.
Journal of Lightwave Technology