Conference paper
Development of 5.8GHz SiGe BiCMOS direct conversion receivers
Sudipto Chakraborty, Scott K. Reynolds, et al.
IMS 2003
We have studied the chemical vapor deposition of copper from 1,5-cyclooctadiene Cu(I) hexafluoroacetylacetonate, a moderately volatile yellow cystalline solid. It yields pure copper by pyrolytic decomposition at 150-250 °C, produces copper films with near bulk resistivity, and has the advantage of being air stable at room temperature.
Sudipto Chakraborty, Scott K. Reynolds, et al.
IMS 2003
Bodhisatwa Sadhu, Scott K. Reynolds
CSICS 2017
Bodhisatwa Sadhu, Yahya Tousi, et al.
IEEE JSSC
Duckhyun Chang, Jerry G. Fossum, et al.
IEEE Electron Device Letters