Vibhor Jain, T. Kessler, et al.
BCTM 2014
We have studied the chemical vapor deposition of copper from 1,5-cyclooctadiene Cu(I) hexafluoroacetylacetonate, a moderately volatile yellow cystalline solid. It yields pure copper by pyrolytic decomposition at 150-250 °C, produces copper films with near bulk resistivity, and has the advantage of being air stable at room temperature.
Vibhor Jain, T. Kessler, et al.
BCTM 2014
Alberto Valdes-Garcia, Bodhisatwa Sadhu, et al.
CICC 2018
Ullrich R. Pfeiffer, David Goren, et al.
ESSCIRC 2005
Xiaoxiong Gu, Duixian Liu, et al.
ECTC 2014