Richard L. Galbraith, Scott K. Reynolds, et al.
IEEE Journal of Solid-State Circuits
We have studied the chemical vapor deposition of copper from 1,5-cyclooctadiene Cu(I) hexafluoroacetylacetonate, a moderately volatile yellow cystalline solid. It yields pure copper by pyrolytic decomposition at 150-250 °C, produces copper films with near bulk resistivity, and has the advantage of being air stable at room temperature.
Richard L. Galbraith, Scott K. Reynolds, et al.
IEEE Journal of Solid-State Circuits
Scott K. Reynolds, Brian A. Floyd, et al.
Proceedings of the IEEE
Brian A. Floyd, Scott K. Reynolds, et al.
IEEE T-MTT
Brian A. Floyd, Alberto Valdes-Garcia, et al.
VLSI-TSA 2010