Coating, mechanical constraints, and pressure effects on electromigration

N.G. Ainslie; F.M. D&#039;Heurle; O.C. Wells

doi:10.1063/1.1654097

Applied Physics Letters

Paper

22 Oct 2003

Coating, mechanical constraints, and pressure effects on electromigration

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Abstract

The effect of the mechanical constraints exerted by coatings upon electromigration in thin films is evaluated on the basis of known pressure effects upon diffusion. © 1972 The American Institute of Physics.

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