O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
In this paper we describe a novel method of eliminating charging during the high resolution SEM inspection and dimensional measurements of x-ray and optical masks. A soluble conducting polymer, polyaniline, is spin-coated on the mask and found to prevent charging even at 15 KV. This method is a non-destructive process in contrast to the commonly used technique of metal deposition, since the polymer can be cleanly removed without any damage to the mask. © 1991.
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Imran Nasim, Melanie Weber
SCML 2024
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics