I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
A brief review of the formation process and Schottky behavior of shallow silicide contacts is presented. Both silicon alloys and refractory metal alloys have been explored for shallow silicide formation, and both high (0.85-0.75 eV) and low (0.50-0.40 eV) Schottky contacts have been demonstrated. © 1986.
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Robert W. Keyes
Physical Review B