Cross-linking of poly{1,1-diaryl(alkyl,aryl) 1-silacyclobutanes} under electron beam and deep UV irradiation

Paper

01 Sep 1997

Paper

J.J. Welser, Sandip Tiwari, et al.

IEEE Electron Device Letters

Paper

Michael G. Rosenfield, S. Rishton, et al.

Microelectronic Engineering

Paper

B.D. Terris, S. Rishton, et al.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Conference paper

John Zahurak, Agis A. Iliadis, et al.

IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits 1992

Related