Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A prototype 28-in.-diagonal desktop data monitor capable of displaying 2048 × 2048- pixel images has been designed, built, and evaluated. The monitor uses optical projection technology. A reflective, crystalline silicon active-matrix light valve using liquid crystal electro-optics and a digital electronic interface architecture is described. This rear- projection monitor has four million resolvable pixels, uses three light valves to achieve color, has a low-gain surface diffuser screen, and functions as a fully interactive, color personal computer monitor with motion video capability. The monitor is 20 in. deep.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sai Zeng, Angran Xiao, et al.
CAD Computer Aided Design
Beomseok Nam, Henrique Andrade, et al.
ACM/IEEE SC 2006
Kaoutar El Maghraoui, Gokul Kandiraju, et al.
WOSP/SIPEW 2010