Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present a simulation-based analysis of device design at the 25 nm channel length generation. Double-gate, ground-plane, and single-gated ultra-thin SOI MOSFET's are considered. Dependencies of short-channel effects on channel thickness and ground-plane bias are illustrated. Two-dimensional field effects in the gate insulator (high k) and the buried insulator (low k) in single-gate SOI are studied.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
John G. Long, Peter C. Searson, et al.
JES
S. Nassif
IEDM 1998
A. Deutsch, H. Harrer, et al.
IEDM 1998