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Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors
Abstract
A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.
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