D. Pohl, W.I. Goldburg
Physical Review Letters
The principle of inertial sliding of a platform on a periodically accelerated support is exploited for the design of a piezoelectric fine-positioning device. The device provides step sizes of 0.04-0.2 μ, speeds of up to 0.2 mm/s, and practically unlimited translation range. It is powered by a sawtooth electric waveform of 60-300-V amplitude and useable for loads of up to 1 kg and probably even more. Mechanical parts and driver electronics are extremely simple, reliable, and easy to operate.
D. Pohl, W.I. Goldburg
Physical Review Letters
E. Haupt, V. Irniger, et al.
Review of Scientific Instruments
P. Muralt, H.P. Meier, et al.
Superlattices and Microstructures
D. Pohl, U.Ch. Fischer, et al.
Journal of Microscopy