Technologies to further reduce soft error susceptibility in SOI
P. Oldiges, R.H. Dennard, et al.
IEDM 2009
The 1/f noise of polycrystalline gold films (5 μm wide and 0.5 μm thick) was found to decrease in the presence of hydrogen, to a level comparable with that in a single-crystal gold film. Additionally, hydrogen was found to segregate to the metal-substrate interface. On the basis of these results and recent evidence in the literature, we propose that hydrogen interacting with interface defects is responsible for both the observed 1/f noise decrease and the previously reported electromigration enhancements.
P. Oldiges, R.H. Dennard, et al.
IEDM 2009
K.P. Rodbell, R.H. Koch
Physical Review B
S.W. Banovic, M.D. Vaudin, et al.
Materials Science and Engineering: A
J.M.E. Harper, K.P. Rodbell
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures