Conference paper
LPCVD IN-SITU ARSENIC DOPED POLYSILICON FOR VLSI APPLICATIONS.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
Experiments were performed on n+-p-n and p+-n+-p transistors to examine the effect of boron impurity compensation on the hole current injected into the heavily arsenic-doped n-type silicon. The result shows that the impurity compensation significantly enhances the hole current only at low temperature, and has little effect at room or higher temperatures. Copyright © 1980 by The Institute of Electrical and Electronics Engineers, Inc.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
O. Thomas, P. Gas, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Alwin E. Michel
Nuclear Inst. and Methods in Physics Research, B
D.D. Tang, G.P. Li, et al.
IEDM 1985