Conference paper
Rapid annealing for shallow junction formation
Alwin E. Michel
ESSDERC 1987
Experiments were performed on n+-p-n and p+-n+-p transistors to examine the effect of boron impurity compensation on the hole current injected into the heavily arsenic-doped n-type silicon. The result shows that the impurity compensation significantly enhances the hole current only at low temperature, and has little effect at room or higher temperatures. Copyright © 1980 by The Institute of Electrical and Electronics Engineers, Inc.
Alwin E. Michel
ESSDERC 1987
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