Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
A novel approach to contactless measurement of voltages on internal nodes of integrated circuits is presented. The method is based on time-resolved photoemission exploiting the single-photon process with short laser pulses in the ultra-violet. The method allows spatial resolution in the submicron range given by the diffraction limit for UV photons, a time resolution of a few picoseconds given by the width of the laser pulses and the electron transit-time effect, and a voltage resolution of a few microvolts within a signal integration time of one second. © 1986.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron