90 nm SiCOH technology in 300 mm manufacturing
L. Clevenger, M. Yoon, et al.
ADMETA 2004
An investigation of the temperature programmed desorption (TPD) of CO and D2 from Ni (111) has been carried out. It has been shown that a differential method for the extraction of the kinetic parameters, threshold temperature programmed desorption (TTPD), can be applied with accuracy near the limit of zero coverage. In this limit, agreement is found between integral and differential methods for kinetic parameter evaluation. The factors which limit the applicability of TTPD are explored and a method to verify its proper application is presented. © 1987 American Institute of Physics.
L. Clevenger, M. Yoon, et al.
ADMETA 2004
Szetsen S. Lee, Maynard J. Kong, et al.
Journal of Physical Chemistry
T. Dalton, N. Fuller, et al.
IITC 2004
Willi Volksen, Theo Frot, et al.
IITC/MAM 2011