Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Fabrication of multilayered nanoporous poly(methyl silsesquioxane)
Abstract
The fabrication of multilayered nanoporous poly(methyl silsesquioxane) (PMSSQ) was studied. The morphology and dimensions of the pores were determined by the interaction between the porogen and the inorganic polymers. It was found that the nanoporous PMSSQ films were optically homogeneous because the pores were much smaller than the wavelength of the visible light.
Related
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Ronald Troutman
Synthetic Metals
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry