BEOL interconnects for 45 nm node and beyond
R.R. Yu, J. Doyle, et al.
VMIC 2005
We find experimentally and calculate by a numerical method the geometrical contribution to resistance due to current bending and constriction in 4-point contact resistance measurements in two configurations: 2I (cross stripes) and 2L. The geometrical effects in thin film couples increase in a 2I and decrease in a 2L with decreasing film thickness/width ratios, rendering the 2L configuration most suitable for interface resistance studies, particularly when the thickness to width ratios are less than 0.5. A set of scaling equations is provided, which enables the application of our results to predict geometrical contributions in these geometries for different materials and dimensions.
R.R. Yu, J. Doyle, et al.
VMIC 2005
F. Liu, R.R. Yu, et al.
IEDM 2008
K.N. Chen, C. Tsang, et al.
VMIC 2006
Robert Bruce, Sebastian Engelmann, et al.
Journal of Physics D: Applied Physics