Joachim N. Burghartz, Mehmet Soyuer, et al.
IEEE Journal of Solid-State Circuits
An experiment to determine the effect of gate electrode resistivity on circuit speed gave unexpected results: circuits with the lowest sheet resistance had the poorest circuit speed. Explanation of this behavior required development of a new high-frequency method of measuring the impedance of the gate electrode. This method revealed that the circuits with a composite gate electrode had been formed with a partial discontinuity. The measurement technique is described, and the evidence of the discontinuity is shown. The effect of the discontinuity on device and circuit speed is demonstrated. © 1996 IEEE.
Joachim N. Burghartz, Mehmet Soyuer, et al.
IEEE Journal of Solid-State Circuits
Shu-Jen Han, Satoshi Oida, et al.
IEEE Electron Device Letters
Yanqing Wu, Yu-Ming Lin, et al.
IEDM 2010
Keith A. Jenkins, Alan J. Weger
IEEE Electron Device Letters