Stas Polonsky, Keith A. Jenkins, et al.
IEEE ITC 2004
An experiment to determine the effect of gate electrode resistivity on circuit speed gave unexpected results: circuits with the lowest sheet resistance had the poorest circuit speed. Explanation of this behavior required development of a new high-frequency method of measuring the impedance of the gate electrode. This method revealed that the circuits with a composite gate electrode had been formed with a partial discontinuity. The measurement technique is described, and the evidence of the discontinuity is shown. The effect of the discontinuity on device and circuit speed is demonstrated. © 1996 IEEE.
Stas Polonsky, Keith A. Jenkins, et al.
IEEE ITC 2004
Yanqing Wu, Yu-Ming Lin, et al.
IEDM 2010
Keith A. Jenkins, Scott E. Doyle
IEEE Circuits and Devices Magazine
Keith A. Jenkins, James P. Eckhardt
IEEE Design and Test of Computers