Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
An energy analyser is described for measuring the energy of the secondary electrons in the scanning electron microscope. It consists of a 63°deflection cylindrical analyser followed by an electron collimator. This is simpler than a mirror design reported previously and gives a higher transmission factor and less defocusing of the electron beam of the microscope. This analyser has been applied to measure point-to-point variations in surface potential with an accuracy to ±1 V.
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025