P.N. First, R.A. Dragoset, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The influence of misfit dislocations on the surface morphology of partially strain relaxed Si1-xGex films is studied by atomic force microscopy and transmission electron microscopy. Surface steps arising from the formation of single and multiple 60°dislocations are identified. The role of such steps in the development of a cross-hatch pattern in surface morphology is discussed. © 1995 American Institute of Physics.
P.N. First, R.A. Dragoset, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
R.M. Tromp, A.W. Denier Van Der Gon, et al.
Physical Review Letters
R.M. Feenstra, R.J. Hauenstein, et al.
ICDS 1984
R.M. Feenstra
Physical Review Letters