A.B. McLean, L.J. Terminello, et al.
Physical Review B
The identification of linear materials for direct electrodeposition of Cu was discussed. Adhesion, recrystallization, texture and resistivity of the plated film were studied. Results showed a family of metals which allow direct Cu electrodeposition in standard acid plating baths.
A.B. McLean, L.J. Terminello, et al.
Physical Review B
J.A. Yarmoff, F.R. McFeely
Physical Review B
M.W. Lane, J.M. Snodgrass, et al.
Microelectronics Reliability
K.A. Miller, C. John, et al.
Thin Solid Films