Low-κ and High-κ breakdown statistics with variability: Clustering model versus reconstruction methodology (Invited)

Abstract

In this work, we first review the characteristics and assumptions of the time-dependent clustering model and the sampling-based reconstruction methodology, two different approaches in dealing with breakdown statistics involving variability for modern BEOL low-κ and FEOL high-κ dielectrics. Then, similarities and differences of these two methodologies will be discussed in comparison with experiments. We show both methodologies can yield comparable results within the validity of their assumptions for dielectrics with small thickness variations. On the other hand, for BEOL low-k dielectrics with large variations, clustering model can be applied in both singlemode non-Weibull and bimodal distributions while the reconstruction methodology cannot be used.