Skip to main content
Research
Focus areas
Blog
Publications
Careers
About
Back
Focus areas
Semiconductors
Artificial Intelligence
Quantum Computing
Hybrid Cloud
Back
About
Overview
Labs
People
Back
Semiconductors
Back
Artificial Intelligence
Back
Quantum Computing
Back
Hybrid Cloud
Back
Overview
Back
Labs
Back
People
Research
Focus areas
Semiconductors
Artificial Intelligence
Quantum Computing
Hybrid Cloud
Blog
Publications
Careers
About
Overview
Labs
People
Open IBM search field
Close
IEEE T-ED
Paper
01 Jan 1973
Machining Integrated Optical Structures in Photoresist
View publication
Abstract
No abstract available.
Related
Paper
COMPARISON OF BACKSCATTERED ELECTRON AND OPTICAL IMAGES FOR SUBMICRON DEFECT DETECTION.
Paper
A rotating-compensator fourier ellipsometer
Conference paper
Gallium arsenide injection laser
Paper
IOTA, a new computer controlled thin film thickness measurement tool
View all publications
