Peter J. Price
Surface Science
Picosecond ultrasonic techniques were used to generate and detect acoustic pulses in bonded silicon-on-insulator structures. By simulating the shapes and amplitudes of the acoustic echoes reflected from the Si-SiO2 interfaces, we can characterize the physical properties of the interfaces. We have observed that via a further thermal annealing process one can change the interface quality of a poorly bonded structure. © 1998 The Electrochemical Society, Inc.
Peter J. Price
Surface Science
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
A. Gangulee, F.M. D'Heurle
Thin Solid Films
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter