Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Picosecond ultrasonic techniques were used to generate and detect acoustic pulses in bonded silicon-on-insulator structures. By simulating the shapes and amplitudes of the acoustic echoes reflected from the Si-SiO2 interfaces, we can characterize the physical properties of the interfaces. We have observed that via a further thermal annealing process one can change the interface quality of a poorly bonded structure. © 1998 The Electrochemical Society, Inc.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Lawrence Suchow, Norman R. Stemple
JES