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Microelectronic Engineering
Images of Fresnel fringes have been obtained in the conventional surface scanning electron microscope operating in the transmission mode. These fringes provide a means for critically evaluating instrument resolution, final lens astigmatism, and source brightness. © 1972 The American Institute of Physics.
A.N. Broers, A.E. Timbs, et al.
Microelectronic Engineering
O.C. Wells, A.N. Broers, et al.
Applied Physics Letters
A.N. Broers
Journal of Applied Physics
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