A.N. Broers
Journal of Applied Physics
We have obtained a low-loss image from a solid specimen in the high-field region of the condenser-objective lens in a high-resolution SEM. These experiments have demonstrated an edge sharpness of 15 Å and a point-to-point resolution of better than 50 Å between gold dots on a latex ball on a solid substrate. In theory, it should be possible to obtain micrographs from solid specimens with a resolution of 10 Å by this method. © 1973 American Institute of Physics.
A.N. Broers
Journal of Applied Physics
A.N. Broers, A.E. Timbs, et al.
Microelectronic Engineering
O.C. Wells, P. Coane, et al.
Microbeam Analysis 1982
O.C. Wells, C.F. Aliotta
Scanning